Solar Cells

Used to prepare multi-component,multi-layer composite dense metal/non-metal, metal oxide/nitride/nitrogen oxide, non-metal oxide/nitride/nitrogen oxide,and other thin film materials with uniform thickness. The target material can be a single compo-nent or multi-component material of metal/non-metal (including magnetic target material), or a single component or multi-component material of metal/non-metal compound. The sample can be annealed in situ at the thin film deposition site in the vacuum chamber of the equipment system.